Analyzer Description
- Configuration:
- Multi-GC
- **Quantity of gas chromatographs and configurations will vary depending on compounds of interest and required detection limits.**
- Sample type:
- High purity silane, silane gas
- Compounds Separated:
- Helium, hydrogen, argon, oxygen, nitrogen, carbon dioxide, carbon monoxide
- Phosphine, arsine, silane, disilane, disiloxane, monochlorosilane (MCS), dichlorosilane (DCS), trichlorosilane (TCS), silicon tetrachloride (STC)
- Methane, ethane, propane, isobutane, n-butane
- Lower detection limits:
- 1 ppm for hydrogen and helium
- 50 ppb for MCS, DCS, TCS, STC
- 150 ppb for disiloxane
- 25 ppb for all remaining components
- Methods met:
- W3117-W3119, W3187
Typical Chromatogram
Key Features and Benefits
- Internally purged diaphragm valves ensure no air contamination and the lowest detection limits possible.
- Ultra-high purity fittings and regulators.
- Contains specially passivated tubing and weldments.
- Can be configured with a Wasson-ECE custom automated sampling system to maintain sample integrity and reduce dangerous accidental venting.