Methylchlorosilanes and Hydrocarbons in Silicon Tetrachloride and Silicon Trichloride

Analyzer Description

5-valve, 3-capillary columns, MSD, cryogenic cooling, in-line sample filters
Sample type:
Silicon tetrachloride, silicon trichloride
Compounds Separated:
Methyldichlorosilane, methyltrichlorosilane, dimethyldichlorosilane, isobutane, n-butane, propane, isopentane, n-pentane
Lower detection limits:
50 ppm
Methods met:
Wasson-ECE W3765

Typical Chromatogram

MSD Chromatogram

Key Features and Benefits

Silane Analysis Literature (PDF)